YES-310TA & YES-58TA
YES-310TA and YES-58TA HMDS prime + image reversal ovens have dual function capabilities, so you get the ultimate “one stop” environment for your process.
YES-TA Series benefits include:
- Precise HMDS application
- More time available between process steps
- Less chemical usage
- Stable process results
The image reversal process reverses the action of positive resist so negative images can be formed with the same resolution and processing ease of positive resist. Additionally, image reversal allows variations of the slope of the photoresist sidewall for higher resolution and improved lift off profiles.