YES SECS/GEM
SEMI E5-0308 and SEMI E30-0307 compatible host communications and remote tool control are available as an option for YES-PB series vacuum ovens. The SECS/GEM host communications option offers the following capabilities:
- Establish communications
- Remote or local tool control
- Status variable reporting
- Equipment constant reporting and modification
- Date & time
- Loop Back Diagnostic
- Status variable limit monitoring
- In-process materials status
- Alarm reporting
- Alarm report enable/disable
- Simultaneous trace reports
- Event report definition and linking
- Event report enable/disable
- Process program selection
- Process program upload/download
- Process program verification
