Polyimide Cure/Bake/Anneal
Vacuum bake at high temperature to ensure elimination of surface moisture.
YES-TA Series – This vacuum bake/vapor prime oven rids wafers of surface moisture and chemically bound water molecules.
YES-ÉcoCoat & YES-LabKote – These silane vapor deposition systems offer moisture resistant surface modification.
YES-450 PB Series – This high temperature vacuum cure oven is ideal for polyimide and BCB bake. They quickly remove airborne oxygen and water vapor from the chamber gas.
