RTP-200 for 200 mm (8″) wafer size or M10 182 x 182 mm solar wafer
Rapid Thermal Process Vacuum oven with high vacuum
Technical Specification
• For one single wafer up to 200mm (8″) diameter
• With integrated gas in- and outlet
• Maximum temperature: 1000 °C
• Ramp up rate: up to 75 K/sec
• Temperature control by thermocouple
• No quartz chamber, aluminium chamber
• Dimensions: about 578 mm x 496 mm x 570 mm (W x D x H)
• Weight: about 70 kg
Part holder
• Quartz tray, fix integrated in door
• Quartz holder for single wafer with 200 mm diameter
Heating
• Heated by 2 x 12 infrared lamps (nominal voltage/power of IR heater: 230 V/2 kW)
• Top and bottom heating (selectable)
Vacuum
• pressure scale 10exp-3 hPa or for RTP-200-HV 10exp-6 hPa
Process Control
• SPS process controller with 50 programs and up to 50 steps each
(ethernet interface), SIMATIC
• 50 programs each with up to 50 steps can be stored on touch panel
• USB 2.0 interface for storage of process data (in CSV file format)
• Including 7″ touch panel for intuitive and comfortable operation
Water cooling
• Water cooling required (inlet pressure: 5 bar, water inlet temperature: 16…20 °C, low water hardness (< 5° dH),
free of Cu particles)
| Options and accessories | |
|---|---|
| RTP-200 | Basic unit |
| RTP-EP | Extended Power with ramp rate better 100K/sec (powerx2) |
| RTP-HT | Extended teperature up to 1200 °C |
| RTP-MFC | Additional process gas line with Mass Flow Controller (max. 3 add)* * = all in all max. 4 process gas lines |
| FG-O2 | Forming gas - oxygen safety unit |
| RTP-Ox | Various oxygen analyser with different tolerances against H traces |
| RTP-MM | Moisture Analyzer to measure moisture residues in the chamber |
| RTP-SW-VP / CH | Switchbox for chiller and/or vacuum pump |
| TC I / TC II | add. Thermocouple to measure on device (plugged in chamber, max. 1) |
| VAC I | Basic Vacuum up to 3 hPa, Vacuum sensor, vacuum valve excl. pump (not for -HV) |
| VAC II | Comfort Vacuum up to 10-3 hPa, Pirani Sensor, vacuum valve, excl. pump (not for HV) |
| VCR | Tubing made of VCR (welded) |
Download (information): RTP-200
